Title :
Microwave On-Wafer Measurements with Active Needle Probe Tips
Author :
Heuermann, Holger
Author_Institution :
Rosenberger HF-Technik, 84526 Tittmoning, Germany
Abstract :
This paper presents new microwave probe tips for on-wafer measurements. These so-called needle probe tips have heads with two or three special needles, which can be changed and provide direct viewing. Additionally, these probe tips allow to implement passiv or activ circuits in the probe. The performance of this new probe tip concept is explained at first. HFSS simulations up to 50 GHz show the good performance of all of the components of these needle probe tips.
Keywords :
Circuits; Coaxial components; Contacts; Coplanar waveguides; Impedance; MMICs; Microwave measurements; Needles; Probes; Stripline;
Conference_Titel :
ARFTG Conference Digest-Spring, 49th
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1997.327230
