Title :
ICMTS 1990. Proceedings of the 1990 International Conference on Microelectronic Test Structures (Cat. No.90CH2797-9)
Abstract :
The following topics are dealt with: test structures for process characterization and control; latchup characterization test structures; test structures for defect analysis and yield management; matrix interconnect schemes and multiplexed test structure arrays; modeling parameter extraction; test structures for reliability analysis; test structures for memory fabrication and yield analysis; test structure measurement data analysis techniques; new test structures and circuits. Abstracts of individual papers can be found under the relevant classification codes in this or other issues. Abstracts of individual papers can be found under the relevant classification codes in this or other issues
Keywords :
integrated circuit technology; integrated circuit testing; monolithic integrated circuits; semiconductor device models; defect analysis; latchup characterization; matrix interconnect schemes; measurement data analysis techniques; memory fabrication; microelectronic test structures; modeling parameter extraction; multiplexed test structure arrays; process characterization; reliability analysis; test circuits; test structures; yield analysis; yield management;
Conference_Titel :
Microelectronic Test Structures, 1990. ICMTS 1990. Proceedings of the 1990 International Conference on
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/ICMTS.1990.67911
