DocumentCode
184511
Title
Distributed temperature estimation in Czochralski crystal growth process
Author
Abdollahi, Javad ; Izadi, Maziar ; Dubljevic, Stevan
Author_Institution
Dept. of Chem. & Mater. Eng., Univ. of Alberta, Edmonton, AB, Canada
fYear
2014
fDate
4-6 June 2014
Firstpage
5349
Lastpage
5354
Abstract
In this work, the conduction-convection PDE model of heat transfer over the time-varying crystal domain is considered. The conduction-convection PDE model of heat transfer is coupled with crystal growth dynamics in the representative example of Czochralski crystal growth process. The infinite-dimensional representation of the heat conduction process is explored within the slow time-varying process effects. The computational framework of the Galerkin´s method is used for parabolic PDE model order reduction over the time-varying domain and the effect of moving boundaries are investigated. An observer is synthesized for temperature distribution reconstruction over the entire crystal domain. The developed observer is applied on the large scale moving mesh finite element model of the process and it is demonstrated that despite parametric and geometric uncertainties in the observer design, the temperature distribution is reconstructed with high accuracy.
Keywords
Galerkin method; chemical engineering; convection; crystal growth from melt; heat conduction; mesh generation; multidimensional systems; observers; parabolic equations; partial differential equations; process control; reduced order systems; temperature control; temperature distribution; time-varying systems; Czochralski crystal growth process; Galerkin method; conduction-convection PDE model; crystal growth dynamics; distributed temperature estimation; geometric uncertainties; heat conduction process; heat transfer; infinite-dimensional representation; large scale moving mesh finite element model; observer design; observer synthesis; parabolic PDE model order reduction; parametric uncertainties; slow time-varying process; temperature distribution reconstruction; time-varying crystal domain; time-varying domain; Crystals; Eigenvalues and eigenfunctions; Heat transfer; Numerical models; Observers; Temperature distribution; Temperature measurement; Distributed parameter systems; Estimation; Materials processing;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference (ACC), 2014
Conference_Location
Portland, OR
ISSN
0743-1619
Print_ISBN
978-1-4799-3272-6
Type
conf
DOI
10.1109/ACC.2014.6859144
Filename
6859144
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