DocumentCode :
1845188
Title :
The effect of voltage and diameter of anodic porous alumina in acid solutions
Author :
Chen, Guo-Dung ; Liu, Cheng-Yang
Author_Institution :
Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu, Taiwan
fYear :
2009
fDate :
18-21 Oct. 2009
Firstpage :
125
Lastpage :
128
Abstract :
Anodic aluminum oxide (AAO) is fabricated by electrochemical anodization of aluminum. This work is focused on the optimization on the diameter of the pores in anodic aluminum oxide (AAO) template. The Al sheet (20 × 20 × 0.15 mm) and Al (1 μm) deposited on silicon wafers (p-type) were used for anodic aluminum oxide (AAO) growth. The growing time, temperatures, kinds of electrolyte, working voltage were used to optimize the anodization of alumina. Besides, the effect of working voltage on the diameter of pores was also investigated. The porous array of alumina film has a uniform; closely packs honeycomb structure approximately 15 nm to 150 nm in diameter. Because of this, the structure is a good material for photonic crystal application in the future. This structure of alumina film is observed by scanning electrical microscope (SEM), and the density of porous channels was also obtained (1010/cm2).
Keywords :
alumina; anodisation; electrochemistry; acid solutions; alumina film; anodic aluminum oxide growth; anodic aluminum oxide template; anodic porous alumina; electrochemical anodization; honeycomb structure; optimization; photonic crystal; porous array; scanning electrical microscope; silicon wafers; Annealing; Chemicals; Honeycomb structures; Materials; Photonics; anodic aluminum oxide; electrochemical process; photonic crystal;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Molecular Medicine and Engineering (NANOMED), 2009 IEEE International Conference on
Conference_Location :
Tainan
Print_ISBN :
978-1-4244-5528-7
Type :
conf
DOI :
10.1109/NANOMED.2009.5559105
Filename :
5559105
Link To Document :
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