• DocumentCode
    1845188
  • Title

    The effect of voltage and diameter of anodic porous alumina in acid solutions

  • Author

    Chen, Guo-Dung ; Liu, Cheng-Yang

  • Author_Institution
    Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu, Taiwan
  • fYear
    2009
  • fDate
    18-21 Oct. 2009
  • Firstpage
    125
  • Lastpage
    128
  • Abstract
    Anodic aluminum oxide (AAO) is fabricated by electrochemical anodization of aluminum. This work is focused on the optimization on the diameter of the pores in anodic aluminum oxide (AAO) template. The Al sheet (20 × 20 × 0.15 mm) and Al (1 μm) deposited on silicon wafers (p-type) were used for anodic aluminum oxide (AAO) growth. The growing time, temperatures, kinds of electrolyte, working voltage were used to optimize the anodization of alumina. Besides, the effect of working voltage on the diameter of pores was also investigated. The porous array of alumina film has a uniform; closely packs honeycomb structure approximately 15 nm to 150 nm in diameter. Because of this, the structure is a good material for photonic crystal application in the future. This structure of alumina film is observed by scanning electrical microscope (SEM), and the density of porous channels was also obtained (1010/cm2).
  • Keywords
    alumina; anodisation; electrochemistry; acid solutions; alumina film; anodic aluminum oxide growth; anodic aluminum oxide template; anodic porous alumina; electrochemical anodization; honeycomb structure; optimization; photonic crystal; porous array; scanning electrical microscope; silicon wafers; Annealing; Chemicals; Honeycomb structures; Materials; Photonics; anodic aluminum oxide; electrochemical process; photonic crystal;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Molecular Medicine and Engineering (NANOMED), 2009 IEEE International Conference on
  • Conference_Location
    Tainan
  • Print_ISBN
    978-1-4244-5528-7
  • Type

    conf

  • DOI
    10.1109/NANOMED.2009.5559105
  • Filename
    5559105