• DocumentCode
    1845418
  • Title

    Lumped-Element Impedance Standards

  • Author

    Williams, Dylan F. ; Walker, David K.

  • Author_Institution
    National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80303, Ph: [+1] (303)497-3138 Fax: [+1] (303) 497-3122 E-mail: dylan@boulder.nist.gov
  • Volume
    33
  • fYear
    1998
  • fDate
    35947
  • Firstpage
    91
  • Lastpage
    93
  • Abstract
    We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard¿s impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
  • Keywords
    Calibration; Ceramics; Coaxial components; Coplanar waveguides; Electric variables measurement; Impedance measurement; Measurement standards; Probes; Resistors; Transmission line measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    ARFTG Conference Digest-Spring, 51st
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    0-7803-5686-1
  • Type

    conf

  • DOI
    10.1109/ARFTG.1998.327285
  • Filename
    4119973
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1845418