Title :
Sensitivity analysis of calibration standards for fixed probe spacing on-wafer calibration techniques [vector network analyzers]
Author :
Safwat, A.M.E. ; Hayden, L.
Author_Institution :
Cascade Microtech Inc., Beaverton, OR, USA
Abstract :
In vector network analyzer calibration, it is clear that the uncertainty in the standard definition leads to inaccurate measurement. We investigate the sensitivity of different on-wafer calibration techniques to probe positioning. Calibration comparison derived error-bounds are calculated for various cases differing only by a single change in probe/standard overlap.
Keywords :
calibration; measurement uncertainty; microwave measurement; network analysers; sensitivity analysis; calibration standards; error bounds; fixed probe spacing on-wafer calibration techniques; ground-signal-ground air coplanar probes; probe positioning; probe/standard overlap; sensitivity analysis; vector network analyzer measurements; Algorithm design and analysis; Calibration; Differential equations; Frequency dependence; Inductance; Length measurement; Measurement standards; Probes; Scattering parameters; Sensitivity analysis;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1012323
