New ARROW optical coupler for optical interconnect

Author

Orobtchouk, R. ; Schnell, N. ; Benyattou, T. ; Gregoire, J. ; Lardenois, S. ; Heitzmann, M. ; Fedeli, J.M.

Author_Institution

Lab. de Phys. de la Matiere, Inst. Nat. des Sci. Appliquees, Villeurbanne, France

fYear

2003

fDate

2-4 June 2003

Firstpage

233

Lastpage

235

Abstract

This paper describes in details design, fabrication and test of a new compact ARROW optical coupler placed at the border of an IC device. This coupler uses vertical directional coupling between a rib ARROW waveguide and a strip silicon submicronic waveguide assisted by a grating. Modelings show that a 75% coupling efficiency can be obtained while measurements were up to 50%.

Keywords

elemental semiconductors; optical directional couplers; optical fabrication; optical interconnections; optical testing; optical waveguides; rib waveguides; semiconductor thin films; silicon; strip line couplers; IC device; Si; coupling efficiency; grating; optical coupler design; optical coupler fabrication; optical coupler test; optical interconnect; rib waveguide; strip silicon submicronic waveguide; vertical directional coupling; Integrated circuit testing; Optical coupling; Optical design; Optical device fabrication; Optical devices; Optical interconnections; Optical waveguides; Photonic integrated circuits; Silicon; Strips;

fLanguage

English

Publisher

ieee

Conference_Titel

Interconnect Technology Conference, 2003. Proceedings of the IEEE 2003 International

Print_ISBN

0-7803-7797-4

Type

conf

DOI

10.1109/IITC.2003.1219763

Filename

1219763