DocumentCode
1846549
Title
An ultra-low-power micro-optoelectromechanical tilt sensor
Author
Constandinou, Timothy G. ; Georgiou, Julius ; Andreou, Charalambos
Author_Institution
ECE Dept., Univ. of Cyprus, Nicosia
fYear
2008
fDate
18-21 May 2008
Firstpage
3158
Lastpage
3161
Abstract
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5deg resolution over a 330deg range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 m times 2.5 mm.
Keywords
CMOS image sensors; micro-optomechanical devices; microsensors; photodiodes; CMOS-MEMS tilt sensor; CMOS-based optical sensor surface; MEMS-based semicircular mass; one-dimensional photodiode array; ultralow-power microoptoelectromechanical tilt sensor; Biomedical engineering; Biomedical optical imaging; Biosensors; Detectors; Educational institutions; Micromechanical devices; Optical sensors; Photodiodes; Sensor systems; Wearable sensors; Inclinometer; MEMS; Microsystem; Tilt Sensor; Vision Chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2008. ISCAS 2008. IEEE International Symposium on
Conference_Location
Seattle, WA
Print_ISBN
978-1-4244-1683-7
Electronic_ISBN
978-1-4244-1684-4
Type
conf
DOI
10.1109/ISCAS.2008.4542128
Filename
4542128
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