Title :
An ultra-low-power micro-optoelectromechanical tilt sensor
Author :
Constandinou, Timothy G. ; Georgiou, Julius ; Andreou, Charalambos
Author_Institution :
ECE Dept., Univ. of Cyprus, Nicosia
Abstract :
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5deg resolution over a 330deg range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 m times 2.5 mm.
Keywords :
CMOS image sensors; micro-optomechanical devices; microsensors; photodiodes; CMOS-MEMS tilt sensor; CMOS-based optical sensor surface; MEMS-based semicircular mass; one-dimensional photodiode array; ultralow-power microoptoelectromechanical tilt sensor; Biomedical engineering; Biomedical optical imaging; Biosensors; Detectors; Educational institutions; Micromechanical devices; Optical sensors; Photodiodes; Sensor systems; Wearable sensors; Inclinometer; MEMS; Microsystem; Tilt Sensor; Vision Chip;
Conference_Titel :
Circuits and Systems, 2008. ISCAS 2008. IEEE International Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-1683-7
Electronic_ISBN :
978-1-4244-1684-4
DOI :
10.1109/ISCAS.2008.4542128
