Title :
Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines
Author :
Arz, Uwe ; Grabinski, Hartmut ; Williams, Dylan F.
Author_Institution :
Laboratorium fÿr Informationstechnologie, Universitÿt Hannover Schneiderberg 32, D-30167 Hannover, Germany Ph: [+49]511.762.5056 E-mail: uarz@lfi.uni-hannover.de
Abstract :
This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
Keywords :
Capacitance; Conductivity; Dielectric substrates; Frequency measurement; Inductance; Laboratories; NIST; Silicon; Skin effect; Transmission lines;
Conference_Titel :
ARFTG Conference Digest-Spring, 54th
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1999.327364
