Design and experimental investigation of a two-DOF piezoelectric actuator

The evolution of modern design and manufacturing, especially MEMS pursuits miniaturization and function integration, which provides new applications and stimulation to the development of automated microassembly techniques. Actuators with large range operation, high accuracy and multifunction are one of the key technologies to meet the new challenges in microassembly. This paper presents the development and construction of a novel integrated piezoelectric rotary-linear-actuator, including design concept and dynamic modeling. A prototype actuator system has been built to conduct experiments, and the experimental results are in agreement with simulation results.