Title :
Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning
Author :
Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R.
Author_Institution :
Sch. of Eng. & Inf. Technol. (SEIT), Univ. of New South Wales, Canberra, ACT, Australia
Abstract :
The imaging performance of an atomic force microscope (AFM) at high scanning speeds is limited due to the cross-coupling properties of its scanning unit; i.e., the piezoelectric tube scanner (PTS). In order to increase the imaging speed of an AFM, a multi-input multi-output (MIMO) model predictive control (MPC) scheme is used for the PTS to reduce its cross-coupling effect. The design of this controller is based on an identified MIMO model of the AFM PTS. Also, a damping compensator is designed and included in the feedback loop with the plant to suppress the vibration of the PTS at the resonant frequency. Experimental results confirm the efficacy of the proposed controller.
Keywords :
MIMO systems; angular velocity control; atomic force microscopy; compensation; control system synthesis; damping; feedback; image scanners; nanopositioning; piezoelectric devices; predictive control; AFM piezoelectric tube scanner; MPC scheme; PTS; atomic force microscope; cross-coupling effect compensation; damping compensator; feedback loop; identified MIMO model; identified multiinput multioutput model; model predictive control scheme; nanopositioning; resonant frequency; vibration suppression; Damping; Frequency measurement; Imaging; MIMO; Mathematical model; Phase measurement; Resonant frequency; Mechanical systems/robotics; Nano systems; Smart structures;
Conference_Titel :
American Control Conference (ACC), 2014
Conference_Location :
Portland, OR
Print_ISBN :
978-1-4799-3272-6
DOI :
10.1109/ACC.2014.6859357
