Ultra-low power metal-oxide gas sensor on plastic foil

Author

Courbat, J. ; Briand, D. ; Yue, L. ; Raible, S. ; de Rooij, N.F.

Author_Institution

Sensors, Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland

fYear

2009

fDate

21-25 June 2009

Firstpage

584

Lastpage

587

Abstract

We report on the design and fabrication of ultra-low power metal-oxide (MOX) gas sensors on plastic foils envisioning their fabrication at large scale and low cost. A complete sensor solution is presented including its packaging at the foil level and the driving/readout circuitry. The latter allowed the sensor to operate in pulsed temperature mode to reduce the power consumption in the sub-mW range. Gas measurements under CO, CH₄ and NO₂ have proven the proper operation of the sensor. These devices are being developed targeting wireless applications.

Keywords

carbon compounds; driver circuits; electronics packaging; gas sensors; nitrogen compounds; plastic packaging; readout electronics; CH₄; CH₄ gas measurement; CO; CO gas measurement; MOX gas sensor; NO₂; NO₂ gas measurement; driving circuitry; low power metal-oxide gas sensor; packaging; plastic foil; pulsed temperature mode measurements; readout circuitry; Circuits; Costs; Energy consumption; Fabrication; Gas detectors; Large-scale systems; Packaging; Plastics; Temperature distribution; Temperature sensors; Low-power; drop-coated; foil level packaging; gas sensor; metal-oxide; plastic foil; polyimide; readout circuitry;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285392

Filename

5285392