A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

This paper introduces the operation concept, fabrication and feasibility of the MEMS digital accelerometer using a microscale liquid-metal (LM) droplet in a microstructured glass channel formed by a photosensitive (PS) glass. Our device employs the advantageous properties of the LM droplet (i.e., high surface tension, high density and electrical conduction) and the PS glass (i.e., photo-definable anisotropic etching and mechanical stability). Especially, the photo-definable property provides a simple and convenient process to make an anisotropically-etched glass channel in the device. Moreover, microstructures are formed uniformly and simultaneously on the glass channel surface during the etching process, which provides easy movement of the LM droplet on the channel surface. Integrating the LM droplet inside the microstructured glass channel, a dramatically simplified yet effective mechanism of the digital accelerometer is realized.