DocumentCode
1851757
Title
Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty
Author
Ding, Shengwei ; Yi, Jingang ; Zhang, Mike Tao ; Akhavan-Tabatabaei, Raha
Author_Institution
Dept. of IE & OR, California Univ., Berkeley, CA
fYear
2006
fDate
8-10 Oct. 2006
Firstpage
112
Lastpage
117
Abstract
Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times are with uncertainty. In this paper, the critical path method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology
Keywords
critical path analysis; optimisation; scheduling; semiconductor device manufacture; Novellus; critical path method; fixed action sequence; multi-cluster tools; performance evaluation; process times uncertainty; schedule optimization; thin film tool; throughput analysis; Automation; Job shop scheduling; Optimal scheduling; Robots; Semiconductor device modeling; Steady-state; Throughput; Timing; USA Councils; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Automation Science and Engineering, 2006. CASE '06. IEEE International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0310-3
Electronic_ISBN
1-4244-0311-1
Type
conf
DOI
10.1109/COASE.2006.326864
Filename
4120330
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