Title :
Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions
Author :
Verd, J. ; Sansa, M. ; Uranga, A. ; Pey, C. ; Abadal, G. ; Perez-Murano, F. ; Barniol, N.
Author_Institution :
Electron. Syst. Group, Univ. de les Illes Balears, Palma, Spain
Abstract :
This paper reports the thermal characterization of MEMS resonator-based oscillators fabricated using a conventional 0.35-mum CMOS process. The MEMS resonators are sub-micrometer scale metal beams which resonance frequency is highly dependent on temperature (up to -2055 ppm/degC). Thanks to the monolithic integration of the oscillator electronics, the oscillator frequency stability is better than 1 ppm allowing temperature resolutions up to 0.00019degC for 0.1 s averaging time, which is at least one order of magnitude better than the best previously reported.
Keywords :
CMOS integrated circuits; frequency stability; micromechanical resonators; microsensors; oscillators; temperature sensors; MEMS resonator; air condition; frequency stability; microdegree temperature resolution; monolithic CMOS-MEMS oscillator; size 0.35 mum; submicrometer scale metal beam; temperature sensor; thermal characterization; time 0.1 s; CMOS process; CMOS technology; Circuits; Micromechanical devices; Optical resonators; Resonance; Resonant frequency; Ring oscillators; Structural beams; Temperature sensors; CMOS-MEMS; Digital temperature sensors; Microresonators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285435
