Title :
Mesoporous thin films as versatile sensitive matrices on Love wave sensors for fast sub-ppm vapor detection
Author :
Tortissier, Gregory ; Blanc, Laurianne ; Tetelin, Angelique ; Pistre, Jacques ; Lachaud, Jean-Luc ; Boissiere, Cedric ; Sanchez, Clement ; Dejous, Corinne ; Rebiere, Dominique
Author_Institution :
Lab. IMS-ENSEIRB, Univ. de Bordeaux, Talence, France
Abstract :
Love wave gas sensors with mesoporous thin film as sensitive layers are presented. They are dedicated to volatile organic compound vapor detection. Mesoporous films of SiO2 were prepared using the sol-gel process and deposited on the devices acoustic path. The obtained films have been characterized by ellipsometry resulting in the determination of porosity and pore size distribution in the film and of water adsorption isotherms. Ethanol (130-2000 ppm) and toluene (70-1000 ppm) exposures resulted in frequency shifts up to 20 kHz, showing the high sensitivity of the mesoporous-based Love wave devices.
Keywords :
Love waves; adsorption; chemical variables measurement; ellipsometry; gas sensors; mesoporous materials; organic compounds; porosity; silicon compounds; sol-gel processing; thin film sensors; thin films; Love wave gas sensors; SiO2; ellipsometry; ethanol; fast sub-ppm vapor detection; frequency 20 kHz; mesoporous thin films; pore size distribution; porosity; sol-gel process; toluene; versatile sensitive matrices; volatile organic compound vapor detection; water adsorption isotherms; Acoustic devices; Acoustic sensors; Acoustic signal detection; Active matrix organic light emitting diodes; Ellipsometry; Ethanol; Gas detectors; Mesoporous materials; Thin film sensors; Volatile organic compounds; Acoustic wave sensors; Love wave sensors; Mesoporous materials; Sol-Gel technique;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285464
