CMOS VCO & LNA implemented by air-suspended on-chip RF MEMS LC

Author

Jeong, Youngkyun ; Doh, Heechan ; Jung, Sungyong ; Park, Daniel Sang-Won ; Lee, Jeong-Bong

Author_Institution

Dept. of Electr. Eng., Texas Univ., Arlington, TX, USA

Volume

1

fYear

2004

fDate

25-28 July 2004

Abstract

This paper presents an IC implementation of a voltage-controlled-oscillator (VCO) and a low-noise-amplifier (LNA) with air-suspended MEMS (microelectromechanical-system) inductors and capacitors, which were designed and is being fabricated with TSMC 0.35 μm CMOS technology. The on-chip MEMS passives have been developed for RF-IC implementation with high-quality-factors (Q), and the MEMS inductor is a spiral type with an air core. These RF-MEMS components are implemented on the top of the active integrated circuits and provide less phase noise cause by substrate conducting loss. The output frequency of 2.44 GHz by MEMS passives, and 740 MHz (2.2 GHz∼2.94 GHz) frequency variation by using MOS varactors were achieved. The MEMS integrated single-stage LNA operates at 2.4 GHz with 8.306 dB of gain (S21) and 1.968 dB of noise-factor (NF).

Keywords

CMOS integrated circuits; active networks; inductors; integrated circuit design; integrated circuit noise; micromechanical devices; microwave amplifiers; microwave integrated circuits; microwave oscillators; phase noise; system-on-chip; varactors; voltage-controlled oscillators; 0.35 micron; 1.968 dB; 2.2 GHz; 2.4 GHz; 2.44 GHz; 2.94 GHz; 740 MHz; 8.306 dB; CMOS VCO; LNA; MEMS capacitors; MEMS inductors; MOS varactors; RF IC implementation; RF MEMS components; TSMC CMOS technology; active integrated circuits; air suspended on-chip RF MEMS LC; high quality factors; low noise amplifier; microelectromechanical system; on-chip MEMS passives; phase noise; voltage controlled oscillator; CMOS integrated circuits; CMOS technology; Capacitors; Frequency; Inductors; Micromechanical devices; Radiofrequency integrated circuits; Radiofrequency microelectromechanical systems; Voltage; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2004. MWSCAS '04. The 2004 47th Midwest Symposium on

Print_ISBN

0-7803-8346-X

Type

conf

DOI

10.1109/MWSCAS.2004.1354005

Filename

1354005