DocumentCode :
1853956
Title :
An investigation of decoupling performance for a novel lateral axis gyroscope with varying environmental parameters
Author :
Cui, Jian ; Liu, X.S. ; Zhao, Q.C. ; Lin, L.T. ; Chi, X.Z. ; Yang, Z.C. ; Yan, Guizhen
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
fYear :
2009
fDate :
21-25 June 2009
Firstpage :
292
Lastpage :
295
Abstract :
This paper makes an investigation on the decoupling performance for a novel lateral axis gyroscope with varying environmental parameters. The testing results show that the decoupling performance of the gyroscope depends on the environment pressure and temperature. The coupling varies from 0.05% to 0.25% with the pressure range of 150 Pa to 100 kPa. The characteristic of coupling with temperature is measured from 20degC to 100degC, which varies from 0.35% to 0.41%. With the high quality factor and small coupling, the device can worked well even at atmospheric pressure. The sensitivity and nonlinearity are 6.7 mV/deg/s and 0.51% with full scale of 800deg/s, respectively.
Keywords :
gyroscopes; micromechanical devices; atmospheric pressure; coupling characteristic; decoupling performance; lateral axis gyroscope; Fabrication; Gyroscopes; Micromechanical devices; Optical coupling; Robust stability; Springs; Structural beams; Temperature measurement; Temperature sensors; Testing; decoupling; lateral axis gyroscope; pressure; temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
Type :
conf
DOI :
10.1109/SENSOR.2009.5285507
Filename :
5285507
Link To Document :
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