DocumentCode :
1854190
Title :
An intelligent wind sensor system with auto-zero function
Author :
Shen, G.P. ; Qin, M. ; Dong, Z.Q. ; Huang, Q.A.
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
fYear :
2009
fDate :
21-25 June 2009
Firstpage :
256
Lastpage :
259
Abstract :
An intelligent wind sensor system including a novel 2-D wind sensor and the interface circuits was presented in this paper. The wind sensor was fabricated on the ceramic substrate using single lift-off process, and packaged by direct chip attach (DCA) packaging. Both the thermal and electrical feedbacks were used to cancel the offset of temperature drift. Full-bridges composed of thermistors were used for wind velocity and direction measurement. The wind tunnel test results show that the wind sensor can measure wind speeds up to 60 m/s, and wind direction in a full range of 360deg with a resolution within 2deg.
Keywords :
ceramics; intelligent sensors; position measurement; substrates; thermistors; velocity measurement; wind; wind tunnels; 2D wind sensor; auto-zero function; ceramic substrate; direct chip attach packaging; electrical feedbacks; intelligent wind sensor system; interface circuits; single lift-off process; temperature drift; thermal feedbacks; thermistors; wind direction measurement; wind tunnel test; wind velocity measurement; Ceramics; Circuits; Feedback; Intelligent sensors; Intelligent systems; Packaging; Semiconductor device measurement; Sensor systems; Velocity measurement; Wind speed; Wind sensor; direct chip attach packaging; intelligent instrument; thermal feedback;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
Type :
conf
DOI :
10.1109/SENSOR.2009.5285514
Filename :
5285514
Link To Document :
بازگشت