Title :
CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS
Author :
Glickman, Michael ; Tseng, Po-Jung ; Harrison, Jonathan ; Goldberg, Ira B. ; Johnson, Peter ; Smeys, Peter ; Niblock, Trevor ; Judy, Jack W.
Author_Institution :
Electr. Eng. Dept., Univ. of California, Los Angeles, CA, USA
Abstract :
We have designed, fabricated, and tested in-plane actuating ferromagnetic MEMS switches and solenoidal inductors, which were produced using a CMOS-compatible back-end process. This process creates compact high-performance devices without high temperature processes (<; 400°C) or etching into the plane of the wafer.
Keywords :
CMOS integrated circuits; inductors; microswitches; solenoids; CMOS-compatible back-end process; MEMS switches; compact high-performance devices; inplane actuating ferromagnetic mems; solenoidal inductors; Amorphous silicon; Coils; Copper; Etching; Inductors; Lithography; Micromechanical devices; Plugs; Resists; Temperature; CMOS Compatible; Horizontal Actuation; Permalloy;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285516
