Design, Electro-Thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing

Author

Velmathi, G. ; Ramshanker, N. ; Mohan, Swati

Author_Institution

Dept. of Instrum., Indian Inst. of Sci., Bangalore, India

fYear

2010

fDate

7-10 Nov. 2010

Firstpage

1258

Lastpage

1262

Abstract

This paper is mainly focused on the optimization of the micromachined heater for gas sensing applications designed to withstand high-temperature. Different microheater geometries and dimensions have been investigated regarding their power consumption, temperature distribution over the sensing area and robustness when annealed at high temperature. The designed microheater withstood annealing temperatures of up to 700°C and moreover robustness of the silicon nitride membrane allowed the sensing area to be heated up to a high temperature 400-700°C.

Keywords

annealing; gas sensors; heating elements; micromachining; microsensors; temperature distribution; thermal analysis; SiN; annealing; double spiral shaped microheater; electro-thermal simulation; gas sensing; geometrical optimization; microheater geometry; micromachined heater; power consumption; suspended membrane; temperature 400 C to 700 C; temperature distribution; Biomembranes; Resistance heating; Spirals; Temperature measurement; Temperature sensors; COMSOLTM; membrane; microheater; spiral shape; thermal imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

IECON 2010 - 36th Annual Conference on IEEE Industrial Electronics Society

Conference_Location

Glendale, AZ

ISSN

1553-572X

Print_ISBN

978-1-4244-5225-5

Electronic_ISBN

1553-572X

Type

conf

DOI

10.1109/IECON.2010.5675550

Filename

5675550