Title :
Sputtered Iridium Oxide for Stimulation Electrode Coatings
Author :
Mokwa, W. ; Wessling, B. ; Schnakenberg, U.
Abstract :
This work deals with the reactive RF-powered sputter deposition of iridium oxide for use as the active stimulation layer in functional medical implants. The oxygen gettered by the growing films is determined by an approach based on generic curves. Films deposited at different stages of oxygen integration show strong differences in electrochemical behaviour, caused by different morphologies. The dependence of electrochemical activity on morphology is further illustrated by RF sputtering onto heated substrates, as well as DC sputtering onto cold substrates.
Keywords :
biomedical electrodes; biomedical materials; electrochemical electrodes; iridium compounds; prosthetics; sputter deposition; sputtered coatings; IrO; RF-powered sputter deposition; electrochemical activity; electrode coatings; functional medical implants; iridium oxide; Biological materials; Biomedical electrodes; Coatings; Implants; Morphology; Plasma measurements; Plasma temperature; Radio frequency; Sputtering; Substrates; Coated Materials, Biocompatible; Electric Conductivity; Electric Stimulation; Electrodes; Equipment Design; Equipment Failure Analysis; Hot Temperature; Iridium; Materials Testing; Nanostructures;
Conference_Titel :
Engineering in Medicine and Biology Society, 2007. EMBS 2007. 29th Annual International Conference of the IEEE
Conference_Location :
Lyon
Print_ISBN :
978-1-4244-0787-3
DOI :
10.1109/IEMBS.2007.4353727
