Abstract :
The following topics are dealt with: actuators; biosensors and biomicrosystems; chemical microsensor and microsystems; sensor materials, fabrication and packaging technology; mechanical/physical sensors and systems; medical microsystems; microfluidics; nanoscale materials and fabrication technology, devices and systems; optical MEMS; power MEMS; RF MEMS, resonators and oscillators; cell manipulation and analysis; and inertial sensors.
Keywords :
biosensors; chemical sensors; electronics packaging; microactuators; microfluidics; micromechanical devices; microsensors; RF MEMS; actuators; biomicrosystems; biosensors; cell manipulation; chemical microsensor; inertial sensors; mechanical sensors; medical microsystems; microfluidics; nanoscale material; optical MEMS; packaging technology; physical sensors; power MEMS; sensor materials;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285578
