Title :
Large area Cds thin film grown by chemical bath deposition
Author :
Liu, Guogen ; Cheng, Zimeng ; Barat, Robert B. ; Pan, Jingong ; Georgiou, George E. ; Chin, Ken K.
Abstract :
Cadmium Sulfide (CdS) thin films are often deposited on glass substrates coated with TCO layers by the close-spaced sublimation (CSS) or sputter techniques in industrial because in-line production integration. It is seldom reported that CdS is deposited by the chemical bath deposition (CBD) batch process. The bottleneck of CBD for commercial application is its low production rate and waste water treatment. In this paper, we report how to produce different thickness large area (100cm2) CdS thin film by CBD. We study how to increase the production rate. The influence of the solution temperature and concentration on the thickness of CdS is investigated.
Keywords :
cadmium compounds; semiconductor growth; semiconductor thin films; sputter deposition; wide band gap semiconductors; CBD batch process; CSS; CdS; SiO2; TCO layers; cadmium sulfide thin films; chemical bath deposition batch process; close-spaced sublimation; in-line production integration; sputter techniques; waste water treatment; Cadmium; Chemicals; Films; Glass; Ions; Production; Substrates;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-9966-3
DOI :
10.1109/PVSC.2011.6185965