Title :
MEMS in TEM : Thermal characterization of sub-20nm nanojunction
Author :
Jalabert, L. ; Ishida, T. ; Volz, S. ; Rousset, B. ; Scheid, E. ; Fujita, H.
Author_Institution :
LIMMS, Univ. of Tokyo, Tokyo, Japan
Abstract :
We present an original approach for investigating thermal transfer through a sub-20nm-diameter nanojunction using MEMS opposing tips with integrated microactuator, microheater and temperature sensor. Real time atomic scale observation in transmission electron microscope (TEM) reveals the nanojunction deformation during the heating steps.
Keywords :
heating; microactuators; temperature sensors; transmission electron microscopy; MEMS; integrated microactuator; microheater; nanojunction deformation; temperature sensor; thermal characterization; transmission electron microscope; Boron; Electrodes; Heat transfer; Heating; Microactuators; Micromechanical devices; Nanoscale devices; Silicon; Temperature sensors; Transmission electron microscopy; MEMS; TEM; heat transfer; nanojunction;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285598
