Title :
Micromachined droplet on demand formation with shear mode piezoelectricity and micron size nozzles
Author :
Cheng, C.H. ; Jung-Tang Huang ; Yu-Lin Huang ; Hsu, Fu-Chiang ; Wu, Thung-Han ; Li, Ching-Cheng ; Huang, L.-S. ; Chang, Shuo-Hung
Author_Institution :
Dept. of Mech. & Autom. Eng., Da-Yeh Univ., Changhua, Taiwan
Abstract :
A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process and MEMS post-process. The pressure chamber, immersed micro-fluidic channel and the nozzle plate are fabricated on a single chip. The droplet-on-demand generator with the piezoelectric actuator and the nozzle located on one side of the chip offers planar assembly design for large quantity fabrication with high yield and low cost. The nozzles with diameter of 4 μm were fabricated and 1 μm nozzle behavior was analyzed. Design, analysis and measurements were presented.
Keywords :
dielectric polarisation; drops; microfluidics; micromachining; nozzles; piezoelectric actuators; piezoelectricity; 1 micron; 4 micron; COMS process; MEMS post-process; microelectromechanical system; microfluidic channel; micromachined droplet on demand formation; micron size nozzles; nozzle plate fabrication; piezoelectric actuator; planar assembly design; poling design; pressure chamber; shear mode piezoelectricity; Assembly; Biomembranes; Fabrication; Ink jet printing; Liquid crystal displays; Manufacturing processes; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric actuators; Piezoelectricity;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500711
