DocumentCode
1856979
Title
Investigation of the main correlations between structural and physical propertiess of InAs quantum dots, embedded between strain-relief GaAsSb layers
Author
Faleev, N. ; Ban, K. -Y ; Bremner, S. ; Smith, David.J. ; Honsberg, C.
Author_Institution
Dept. of Electr., Comput. & Energy Eng., Arizona State Univ., Tempe, AZ, USA
fYear
2011
fDate
19-24 June 2011
Abstract
Strong correlations between crystal perfection of epitaxial structures and size, density and PL features of deposited InAs QDs have been found. Increase of a Sb composition in GaAsSb strain relief layers from 8% to 37% significantly disturbed crystal perfection of epitaxial structures and increased the density of deposited QDs from 2-2.5 × 1010 cm-2 at 8% Sb structure to 7.5-9.5 × 1010 cm-2 at 16% Sb structure. At 37% Sb initial elastic stress was noticeably relaxed (≈ 40%) while creation of QDs was fully blocked. Relaxation of elastic stress strongly increased the density of dislocation loops in epitaxial layers and affected atomic migration on the growth front. Observed correlations between density of dislocation loops and QDs are related with a diminution of the energy of migrated atoms, caused by dislocations. At definite density of dislocation loops, reduced energy diminished accumulation of deposited atoms below the level critical for their transformation to QDs.
Keywords
III-V semiconductors; epitaxial growth; gallium arsenide; indium compounds; quantum dots; GaAsSb; InAs; atomic migration; atoms; dislocation loop density; disturbed crystal perfection; elastic stress relaxation; epitaxial structures; initial elastic stress; physical properties; quantum dots; strain-relief layers; structural properties; Atomic layer deposition; Crystals; Epitaxial growth; Epitaxial layers; Strain; Substrates; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location
Seattle, WA
ISSN
0160-8371
Print_ISBN
978-1-4244-9966-3
Type
conf
DOI
10.1109/PVSC.2011.6185996
Filename
6185996
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