• DocumentCode
    1856979
  • Title

    Investigation of the main correlations between structural and physical propertiess of InAs quantum dots, embedded between strain-relief GaAsSb layers

  • Author

    Faleev, N. ; Ban, K. -Y ; Bremner, S. ; Smith, David.J. ; Honsberg, C.

  • Author_Institution
    Dept. of Electr., Comput. & Energy Eng., Arizona State Univ., Tempe, AZ, USA
  • fYear
    2011
  • fDate
    19-24 June 2011
  • Abstract
    Strong correlations between crystal perfection of epitaxial structures and size, density and PL features of deposited InAs QDs have been found. Increase of a Sb composition in GaAsSb strain relief layers from 8% to 37% significantly disturbed crystal perfection of epitaxial structures and increased the density of deposited QDs from 2-2.5 × 1010 cm-2 at 8% Sb structure to 7.5-9.5 × 1010 cm-2 at 16% Sb structure. At 37% Sb initial elastic stress was noticeably relaxed (≈ 40%) while creation of QDs was fully blocked. Relaxation of elastic stress strongly increased the density of dislocation loops in epitaxial layers and affected atomic migration on the growth front. Observed correlations between density of dislocation loops and QDs are related with a diminution of the energy of migrated atoms, caused by dislocations. At definite density of dislocation loops, reduced energy diminished accumulation of deposited atoms below the level critical for their transformation to QDs.
  • Keywords
    III-V semiconductors; epitaxial growth; gallium arsenide; indium compounds; quantum dots; GaAsSb; InAs; atomic migration; atoms; dislocation loop density; disturbed crystal perfection; elastic stress relaxation; epitaxial structures; initial elastic stress; physical properties; quantum dots; strain-relief layers; structural properties; Atomic layer deposition; Crystals; Epitaxial growth; Epitaxial layers; Strain; Substrates; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
  • Conference_Location
    Seattle, WA
  • ISSN
    0160-8371
  • Print_ISBN
    978-1-4244-9966-3
  • Type

    conf

  • DOI
    10.1109/PVSC.2011.6185996
  • Filename
    6185996