Title :
Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
Author :
Wojciechowski, K.E. ; Olsson, R.H., III ; Tuck, M.R. ; Roherty-Osmun, E. ; Hill, T.A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Aluminum nitride (AlN) contour mode resonators have been of interest because of their high quality factor, low impedance, large number of frequencies on a single chip and compatibility with CMOS processes. While AlN low insertion loss filters and oscillators have been demonstrated, CMOS integration has yet to be accomplished. This work represents the first time fully-released contour mode AlN microresonators have been integrated with CMOS circuitry to obtain completely monolithic frequency references.
Keywords :
CMOS integrated circuits; Q-factor; aluminium compounds; filters; microsensors; oscillators; AlN; CMOS processes; contour mode microresonators; high quality factor; high-Q MEMS resonator; low insertion loss filters; monolithic frequency references; multifrequency MEMS resonators; single-chip precision oscillators; Aluminum nitride; CMOS process; Frequency; Impedance; Insertion loss; Microcavities; Micromechanical devices; Oscillators; Q factor; Resonator filters; Aluminum Nitride; CMOS; Integrated; MEMS; Monolithic; Oscillator; Pierce Oscillator; Resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285626
