Provision of integrated micro-nanotechnologies via toolkits in the Europractice Service Project INTEGRAMplus

Summary form only given. INTEGRAMplus is an initiative supported by the European Commission to provide access to a flexible design and prototyping service with a route to volume manufacture of novel products based on integrated microsystems. Its aim is to lower access barriers to integrated micro-nanotechnology (MNT) solutions by providing a portfolio of standardised multi- domain and multi-technology modules and prototyping platforms. The use of microsystem products in emerging markets such as biomedical and healthcare, environmental monitoring, etc requires integration of functions such as fluidic, optical, mechanical, electrical, biological, etc. No single material technology (silicon, polymer, glass) system can provide all these in a cost-effective way. For example, silicon is very attractive for its ability to provide very high liquid dispensing accuracy in microfluidics and also for integration with drive/signal processing electronics for intelligent sensors. However, other functions such as fluidic handling, interfacing and environmental packaging require hybridisation with other low-cost materials such as polymers. End-users without MNT expertise who would like to develop new functions and products or to improve their existing products through miniaturisation are guided through the complete development supply chain from concept, through design and feasibility studies, to prototyping and manufacturing. End-users who are familiar with MNT technology and/or have their own design concepts can access low-risk low-cost-of-entry prototyping services based on standardised processes, components and toolkits. Examples of the use of the toolkits available and case studies will be discussed in this paper.