Nanoencoders based on arrays of single nanotube emitters

Author

Dong, Lixin ; Subramanian, Arunkumar ; Nelson, Bradley J.

Author_Institution

Swiss Fed. Inst. of Technol., Switzerland

fYear

2005

fDate

11-15 July 2005

Firstpage

211

Abstract

Linear encoders for nanoscale position sensing based on single multiwalled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.

Keywords

carbon nanotubes; electron beam lithography; field emitter arrays; nanopositioning; nanotube devices; plasma CVD; position measurement; scanning electron microscopy; PECVD; SEM; e-beam lithography; emission distribution; field emission properties; lateral position sensing; linear encoders; nanoencoders; nanometer resolution; nanorobotic manipulator; nanoscale position sensing; plasma-enhanced chemical vapour deposition growth; scanning anode; scanning electron microscope; single nanotube emitter arrays; vertically aligned single multiwalled carbon nanotube arrays; Anodes; Carbon nanotubes; Chemical vapor deposition; Laser feedback; Lithography; Nanoscale devices; Nickel; Optical feedback; Plasma chemistry; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2005. 5th IEEE Conference on

Print_ISBN

0-7803-9199-3

Type

conf

DOI

10.1109/NANO.2005.1500731

Filename

1500731