High sigma measurement of random threshold voltage variation in 14nm Logic FinFET technology

Random variation of threshold voltage (Vt) in MOSFETs plays a central role in determining the minimum operating voltage of products in a given process technology. Properly characterizing Vt variation requires a large volume of measurements of minimum size devices to understand the high sigma behavior. At the same time, a rapid measurement approach is required to keep the total measurement time practical. Here we describe a new test structure and measurement approach that enables practical characterization of Vt distributions to high sigma and its application to 14nm Logic FinFET technology. We show that both NMOS and PMOS single fin devices have very low random Vt variation of 19mV and 24mV respectively, normally distributed out to +/-5σ.