• DocumentCode
    1857541
  • Title

    Digitally-specified micromechanical displacement amplifiers

  • Author

    Lin, Yang ; Li, Wei-Chang ; Gurin, Ilya ; Li, Sheng-Shian ; Lin, Yu-Wei ; Ren, Zeying ; Kim, Bongsang ; Nguyen, Clark T C

  • Author_Institution
    Univ. of California at Berkeley, Berkeley, CA, USA
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    781
  • Lastpage
    784
  • Abstract
    A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based mechanical power amplifiers and power converters, because it can prevent unwanted drive electrode-to-resonator impact in such circuits. This design, however, differs from that in that 1) it can be applied to radial-contour mode disks that can achieve much higher frequency than the wine-glass disks; 2) it preserves the frequency and Q of its constituent resonators (whereas the method of changed the frequency and lowered the Q); and 3) its digital method for gain specification is much more straightforward, accurate, and repeatable.
  • Keywords
    micromechanical resonators; microswitches; power amplifiers; power convertors; digital gain; micromechanical displacement amplifier; power converters; quarter-wavelength beam; radial-contour mode disk; resoswitch-based mechanical power amplifier; two-asymmetric resonator array; wine-glass disk; Circuits; Drives; Electrodes; Frequency; Micromechanical devices; Power amplifiers; Radiofrequency amplifiers; Radiofrequency microelectromechanical systems; Resonance; Switches; Micromechanical devices; RF MEMS; displacement amplifier; power amplifier; power converter; radialcontour mode; resonant switch; resonator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285651
  • Filename
    5285651