Peristaltic micropump fabricated by depositing parylene directly on liquid

We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7 mulscr/min and generate a differential pressure of 41 Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.