A cross-junction channel valveless-micropump with integrated hotwires for fluidic application

This paper proposes a new valve-less pump with cross-junction channels and integrated hotwires. The pump was actuated by PZT diaphragm to create a gas jet flow for fluidic application. The design and simulation are based on transient fluidic analysis with experimental result of PZT diaphragm so that features of micropump is predicted with high reliability. Two designs of the pumps with different nozzles were investigated to study 3D nozzle effect. The micro pump was fabricated by standard MEMS process. Experiment was performed and agreement has been achieved between simulated and experimental results. The flow rate of 4.3 sccm was achieved at the driving voltage of 40 Vpp in frequency response of 7.9 kHz. The discharge pressure of 0.18 kPa was measured at 40 Vpp and the output voltage of the hotwire was 1.07 V at the constant applied voltage of 0.4 mA.