Title :
Surface morphology and light scattering properties of the AZO/ITO bi-layer with native textured capability
Author :
Liu, Jia-Hsiang ; Lin, Chien-Hung ; Yang, Chih-Chun ; Chan, I-Min
Author_Institution :
TF RD Dev. Div., AU Optronics Corp., Taichung, Taiwan
Abstract :
Light trapping, i.e. increasing the path length of incoming light, plays a decisive role for photovoltaic device performance for thin film silicon solar cells. This paper discusses way to demonstrate a bi-layer structure with high haze by using all dry process. Al doped ZnO (AZO:Al) film was continuously deposited on ITO precursor by pulse direct current magnetron sputtering. The various deposition temperature of the ITO glass substrate to improve the electrical and optical properties of AZO/ITO bi-layer transparent conductive oxides (TCOs) as transmittance, haze, surface morphology, sheet resistance (Rs), carrier concentration (n) and Hall mobility (μ). The AZO/ITO bi-layer presents excellent average Rs (4ω/sq), transmittance (81%) and haze (33%).
Keywords :
Hall mobility; II-VI semiconductors; aluminium; elemental semiconductors; glass; solar cells; sputter deposition; surface morphology; zinc compounds; AZO/ITO bi-layer transparent conductive oxides; Hall mobility; ITO glass substrate; ITO precursor; Si; SiO2; TCO; ZnO:Al-ITO; bi-layer structure; carrier concentration; deposition temperature; dry process; electrical properties; haze; light scattering properties; light trapping; native textured capability; optical properties; photovoltaic device performance; pulse direct current magnetron sputtering; sheet resistance; surface morphology; thin film silicon solar cells; transmittance; Glass; Indium tin oxide; Optical films; Substrates; Surface morphology; Temperature;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-9966-3
DOI :
10.1109/PVSC.2011.6186037
