Title :
Assembly of arrays of individual lateral nanotube emitters on nanoelectrodes
Author :
Subramanian, Arunkumar ; Dong, Lixin ; Nelson, Bradley J.
Author_Institution :
Swiss Fed. Inst. of Technol., Zurich, Switzerland
Abstract :
Composite AC - DC dielectrophoresis (DEP) is used to assemble arrays of individual multi-walled carbon nanotubes (MWNTs) onto gold nanoelectrodes. The nanoelectrodes are fabricated on silicon chips using electron-beam lithography. Using suitably designed electrodes for DEP or by electrical breakdown of the assembled nanotubes, individual nanotubes with one end end protruding from an electrode and the other end in proximity to another electrode are realized. Such nanotube arrays can be used as lateral field emitters, nanorelays and in other nanoelectromechanical systems (NEMS).
Keywords :
carbon nanotubes; electric breakdown; electrodes; electron beam lithography; electrophoresis; field emitter arrays; C; Si; composite AC dielectrophoresis; composite DC dielectrophoresis; electrical breakdown; electrodes; electron-beam lithography; gold nanoelectrodes; lateral field emitters; multiwalled carbon nanotubes; nanoelectromechanical systems; nanorelays; nanotube arrays; nanotube emitters; silicon chips; Assembly; Carbon nanotubes; Dielectrophoresis; Electric breakdown; Electrodes; Field emitter arrays; Gold; Lithography; Nanoelectromechanical systems; Silicon;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500771