Title :
Feedback enhanced thermo-electric topography sensing
Author :
Sebastian, A. ; Wiesmann, D. ; Baechtold, P. ; Rothuizen, H. ; Despont, M. ; Drechsler, U.
Author_Institution :
Zurich Res. Lab., IBM, Ruschlikon, Switzerland
Abstract :
Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage. In this article we present a novel scheme for enhancing the sensitivity and bandwidth of these sensors using an external feedback. This scheme demonstrates the applicability of feedback control to shape a sensor´s sensing dynamics.
Keywords :
cantilevers; microsensors; silicon; thermal conductivity; thermoelectric devices; Si; external feedback; feedback control; low sensing bandwidth; microfabricated silicon cantilever; sensing dynamics; sensitivity; temperature-dependent conductivity; thermoelectric sensor; thermoelectric topography sensing; Bandwidth; Feedback; Power system modeling; Silicon; Surfaces; Temperature sensors; Thermal resistance; Thermal sensors; Transfer functions; Voltage; Micro-cantilevers; thermo-electric sensing; topography sensing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285675
