Title :
Design and modeling of an RFIC pad structure and probe contact impedance correction for on-wafer measurements
Author :
Capovilla, C.E. ; Tavora, A.S.A. ; Kretly, L.C.
Author_Institution :
Dept. of Microwave & Opt., State Univ. of Campinas, Campinas
Abstract :
This work describes the design and modeling of RF and ground pads as a GSG structure for on-wafer measurements. An equivalent circuit is proposed take into account ESD protection and the parasitic elements of the structure. The problem of the impedance contact between the microprobe and the GSG structure is also reported, as well as, results of an application using this structure on an LNA design. The concordance between the simulation results and the measured ones validates the model.
Keywords :
CMOS integrated circuits; S-matrix theory; contact resistance; electrostatic discharge; field effect MMIC; integrated circuit design; integrated circuit modelling; microwave amplifiers; ESD protection; LNA design; RFIC PAD structure modeling; equivalent circuit; ground-signal-ground structure; on-wafer measurements; parasitic elements; probe contact impedance correction; Electrostatic discharge; Equivalent circuits; Foundries; Impedance measurement; Probes; Protection; RF signals; Radio frequency; Radiofrequency integrated circuits; Semiconductor device modeling;
Conference_Titel :
Devices, Circuits and Systems, 2008. ICCDCS 2008. 7th International Caribbean Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-1956-2
Electronic_ISBN :
978-1-4244-1957-9
DOI :
10.1109/ICCDCS.2008.4542646
