DocumentCode :
1858076
Title :
Pyroelectric IR sensor array using lead-free pyroelectric NBT thin film on epitaxial γ-Al2O3/si(100) substrates
Author :
Sugai, T. ; Kikuchi, K. ; Yoshita, R. ; Akai, D. ; Sawada, K. ; Ishida, M.
Author_Institution :
Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan
fYear :
2009
fDate :
21-25 June 2009
Firstpage :
1971
Lastpage :
1974
Abstract :
In this work, we fabricated lead-free pyroelectric infrared (IR) sensor array on epitaxial gamma-Al2O3/Si(100) substrates with signal processing circuit using pyroelectric (Na0.5Bi0.5)TiO3 (NBT) thin film deposited by chemical solution deposition (CSD), and we also investigated feasibility of NBT thin film in Si processes.
Keywords :
ferroelectric thin films; infrared detectors; infrared imaging; niobium compounds; pyroelectric detectors; pyroelectricity; sensor arrays; (Na0.5Bi0.5)TiO3; Al2O3-Si; NBT thin film; chemical solution deposition; pyroelectric IR sensor array; Chemical sensors; Environmentally friendly manufacturing techniques; Gamma ray detectors; Infrared sensors; Pyroelectricity; Semiconductor thin films; Sensor arrays; Sputtering; Thin film circuits; Thin film sensors; γ-Al2O3 (Na0.5Bi0.5) TiO3 thin film; Infrared detectors; pyroelectric detectors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
Type :
conf
DOI :
10.1109/SENSOR.2009.5285677
Filename :
5285677
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1858076
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