Title :
High electromechanical coupling in PZT epitaxial thick film resonators at 550 ºC
Author :
Yanagitani, Takahiko ; Katada, Katsuyoshi ; Suzuki, M. ; Wasa, Kiyotaka
Author_Institution :
Nagoya Inst. of Technol., Nagoya, Japan
Abstract :
A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3 film was demonstrated. Thickness extensional mode electromechanical coupling coefficient kt of the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high kt of 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high kt of 0.42 was also observed in thick PbTiO3 film (with 2.8 μm) at 550 °C.
Keywords :
Curie temperature; crystal resonators; electromechanical effects; lead compounds; thick film devices; titanium compounds; zirconium compounds; Curie temperature; PZT; PZT epitaxial thick film resonators; PbTiO3; acoustic resonator structure; electromechanical coupling coefficient; high temperature shift; size 2.8 mum; size 4.4 mum; temperature 500 C; temperature 550 C; thick PZT film; thickness extensional mode; Couplings; Epitaxial growth; Loss measurement; Substrates; Temperature; Temperature sensors; (key words); Electromechanical coupling coefficient; High temperature piezoelectric material; Shift of Curie temperature; Thick epitaxial PZT film;
Conference_Titel :
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location :
Taipei
DOI :
10.1109/FCS.2014.6859872
