The load characteristic of a movable Stewart platform using piezoelectric element

The actuator that works in unreachable small space and measures small displacements is required. A lot of research groups proposed and developed the actuators operating in a small production system. The motion of these actuators was limited to liner and rotational displacement in the horizontal surface. We proposed the micro actuators with multiple degrees of freedom consisted of six piezoelectric elements and six electromagnets. The actuator can be operated by two motion modes. One is a stage motion mode, and the other is a movable motion mode. The weight of an object put on the stage and the orientation of the stage affect the motion of the actuator. We describe the relationship between the motion of the actuator and the load on the stage.