Title :
Free accessible microchannel formed by wide range wettability control using nano-geometric surface
Author :
Sugita, M. ; Sakuma, Shinya ; Arai, Fumihito
Author_Institution :
Nagoya Univ., Nagoya, Japan
Abstract :
We succeeded in manipulating a microparticle in a free accessible microchannel formed by air-liquid interface by using the on-chip robot. To pattern the stable air-liquid interface in the microfluidic chip, we controlled the wettability of the surface using the nano-geometric surface, which was fabricated by the hybrid mask lithography technique using composite of photoresist and nanoparticle. By adjusting the density of nanopillar coated fluorocarbon or SiO2, the contact angle was controlled from 0 degree to 160 degree. Finally, we demonstrated the on-chip transfer and isolation of the microparticle by the developed free accessible microchannel and the MMT.
Keywords :
bioMEMS; biological techniques; coating techniques; contact angle; lab-on-a-chip; masks; microchannel flow; microfabrication; nanofabrication; nanolithography; nanoparticles; organic compounds; photoresists; silicon compounds; wetting; MMT; SiO2; SiO2 density; air-liquid interface; contact angle; free accessible microchannel; hybrid mask lithography technique; microfluidic chip; microparticle isolation; nanogeometric surface; nanoparticle; nanopillar coated fluorocarbon density; on-chip robot; on-chip transfer; photoresist composite; surface wettability; wide range wettability control;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2012 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4673-4811-9
DOI :
10.1109/MHS.2012.6492406