Title :
Characterization of water vapor permeation through thin film Parylene C
Author :
Menon, P.R. ; Li, W. ; Tooker, A. ; Tai, Y.C.
Author_Institution :
Electr. Eng. Dept., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A microfluidic structure to measure water vapor permeation through thin film Parylene C was successfully fabricated and tested. Chips were re-tested multiple times with consistent results. These chips were tested at 20degC, 30%RH and measured WVTR data that matched equivalent wet-cup/beaker tests, showing that these devices are indeed functional and can be used to measure WVTR with repeatable reliability. Using the Arrhenius Relation and varied temperature testing, activation energies were determined for water vapor through Parylene C that agree closely with literature and also better predicts Parylene C behavior than the previously reported activation energy.
Keywords :
flow measurement; microfluidics; water; Arrhenius relation; activation energies; microfluidics; thin film parylene C; water vapor permeation; Microchannel; Microfluidics; Micromechanical devices; Optical films; Polyimides; Reservoirs; Semiconductor device measurement; Temperature; Testing; Transistors; Parylene C; Water vapor permeation; microfluidics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285687
