DocumentCode :
1858437
Title :
Spatially selective removal of carbon nanotubes for fabricating nanotube circuits
Author :
Suzuki, Satoru ; Fukuba, Shin-ya ; Kanzaki, Kenichi ; Homma, Yoshikazu ; Kobayashi, Yoshihiro
Author_Institution :
NTT Basic Res. Labs., Japan
fYear :
2005
fDate :
11-15 July 2005
Firstpage :
426
Abstract :
Spatially selective removal of single-walled carbon nanotubes from a random nanotube network is demonstrated. The method simply involves local irradiation of a low-acceleration-voltage electron beam and annealing in air, and could be applied for the fabrication of a various kinds of nanotube networks. Raman spectroscopy measurements showed that the elimination of nanotubes during annealing is due to damage caused by the low-acceleration-voltage electron irradiation. Less defective nanotubes showed a higher tolerance against the irradiation damage. The higher tolerance was found to be maintained even after the irradiation damage was induced.
Keywords :
Raman spectra; annealing; carbon nanotubes; electron beam effects; nanotechnology; C; Raman spectra; annealing; irradiation damage; low acceleration-voltage electron beam; single-walled carbon nanotube circuit fabrication; spatially selective removal; Annealing; Carbon nanotubes; Circuits; Electron beams; Laboratories; Nanotechnology; Raman scattering; Scanning electron microscopy; Spectroscopy; Telegraphy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
Type :
conf
DOI :
10.1109/NANO.2005.1500788
Filename :
1500788
Link To Document :
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