Spatially selective removal of carbon nanotubes for fabricating nanotube circuits

Author

Suzuki, Satoru ; Fukuba, Shin-ya ; Kanzaki, Kenichi ; Homma, Yoshikazu ; Kobayashi, Yoshihiro

Author_Institution

NTT Basic Res. Labs., Japan

fYear

2005

fDate

11-15 July 2005

Firstpage

426

Abstract

Spatially selective removal of single-walled carbon nanotubes from a random nanotube network is demonstrated. The method simply involves local irradiation of a low-acceleration-voltage electron beam and annealing in air, and could be applied for the fabrication of a various kinds of nanotube networks. Raman spectroscopy measurements showed that the elimination of nanotubes during annealing is due to damage caused by the low-acceleration-voltage electron irradiation. Less defective nanotubes showed a higher tolerance against the irradiation damage. The higher tolerance was found to be maintained even after the irradiation damage was induced.

Keywords

Raman spectra; annealing; carbon nanotubes; electron beam effects; nanotechnology; C; Raman spectra; annealing; irradiation damage; low acceleration-voltage electron beam; single-walled carbon nanotube circuit fabrication; spatially selective removal; Annealing; Carbon nanotubes; Circuits; Electron beams; Laboratories; Nanotechnology; Raman scattering; Scanning electron microscopy; Spectroscopy; Telegraphy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2005. 5th IEEE Conference on

Print_ISBN

0-7803-9199-3

Type

conf

DOI

10.1109/NANO.2005.1500788

Filename

1500788