Title :
Capacitive driving and sensing of a bi-axial scanning micromirror for projection display
Author :
Sheng-Gang Fu ; Lin, Dongyang ; Lai, Hsin-Cheng ; Hung, Alice ; Lu, Michael S-C
Author_Institution :
Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
A bi-axial scanning micromirror is typically used for scanning-type projectors to receive and deflect laser beams to form two-dimensional images pixel by pixel. The operation requires the micromirror to be driven at its resonant frequency which can vary due to fabrication tolerance and temperature drift, necessitating the use of a closed-loop oscillator circuit. This study reports capacitive driving and sensing of a micromirror fabricated by using the silicon-on-insulator (SOI) technology. The micromirror is driven at 1.2 kHz and 22.9 kHz along the two axes to achieve WVGA imaging resolution.
Keywords :
capacitive sensors; display instrumentation; elemental semiconductors; laser beams; microfabrication; micromirrors; microsensors; optical projectors; optical scanners; optical sensors; oscillators; silicon; silicon-on-insulator; SOI technology; Si; WVGA imaging resolution; bi-axial scanning micromirror; capacitive driving; capacitive sensing; closed-loop oscillator circuit; frequency 1.2 kHz; frequency 22.9 kHz; laser beam; projection display; scanning-type projector; silicon-on-insulator technology; two-dimensional image pixel; CMOS integrated circuits; Laser beams; Micromirrors; Phase locked loops; Resonant frequency; Sensors;
Conference_Titel :
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location :
Taipei
DOI :
10.1109/FCS.2014.6859890
