Capacitive driving and sensing of a bi-axial scanning micromirror for projection display

Author

Sheng-Gang Fu ; Lin, Dongyang ; Lai, Hsin-Cheng ; Hung, Alice ; Lu, Michael S-C

Author_Institution

Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

fYear

2014

fDate

19-22 May 2014

Firstpage

1

Lastpage

2

Abstract

A bi-axial scanning micromirror is typically used for scanning-type projectors to receive and deflect laser beams to form two-dimensional images pixel by pixel. The operation requires the micromirror to be driven at its resonant frequency which can vary due to fabrication tolerance and temperature drift, necessitating the use of a closed-loop oscillator circuit. This study reports capacitive driving and sensing of a micromirror fabricated by using the silicon-on-insulator (SOI) technology. The micromirror is driven at 1.2 kHz and 22.9 kHz along the two axes to achieve WVGA imaging resolution.

Keywords

capacitive sensors; display instrumentation; elemental semiconductors; laser beams; microfabrication; micromirrors; microsensors; optical projectors; optical scanners; optical sensors; oscillators; silicon; silicon-on-insulator; SOI technology; Si; WVGA imaging resolution; bi-axial scanning micromirror; capacitive driving; capacitive sensing; closed-loop oscillator circuit; frequency 1.2 kHz; frequency 22.9 kHz; laser beam; projection display; scanning-type projector; silicon-on-insulator technology; two-dimensional image pixel; CMOS integrated circuits; Laser beams; Micromirrors; Phase locked loops; Resonant frequency; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2014 IEEE International

Conference_Location

Taipei

Type

conf

DOI

10.1109/FCS.2014.6859890

Filename

6859890