Exploring the resolution of different disk-type chemical sensors

Author

Truax, S. ; Demirci, K.S. ; Hierlemann, A. ; Brand, O.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

1838

Lastpage

1841

Abstract

Chemical sensitivities and limits of detection to volatile organic compounds (VOCs) for polymer-coated disk resonators in the gas phase are reported. The dependence of the sensor performance on the device geometry is investigated. The use of rotational inplane modes results in high frequency stabilities, with Allan variances as low as 7.8 times 10^-9 being achieved for 25 mum thick resonators. A limit of detection of 18.3 ppm for toluene was obtained for a 5 mum thick device coated with an only 20 nm thick polymer layer.

Keywords

chemical sensors; chemical variables measurement; polymers; resonators; Allan variances; VOC; chemical sensitivity; disk-type chemical sensors; polymer coated disk resonators; polymer layer; thick resonators; toluene; volatile organic compounds; Chemical compounds; Chemical sensors; Frequency; Gas detectors; Geometry; Organic chemicals; Phase detection; Polymers; Stability; Volatile organic compounds; chemical microsensor; resonator; volatile organic compound;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285703

Filename

5285703