Magnetic sensors based on micromechanical oscillators

Author

Li, Meng ; Rouf, Vashwar T. ; Sonmezoglu, S. ; Horsley, David A.

Author_Institution

Berkeley Sensor & Actuator Center, Univ. of California, Davis, Davis, CA, USA

fYear

2014

fDate

19-22 May 2014

Firstpage

1

Lastpage

3

Abstract

This paper describes magnetic sensor technology based on the detection of Lorentz force on a micromechani-cal oscillator. Experimental results are presented based on a silicon resonator operating at 105.5 kHz with a quality factor of 13,000. Sensor operation is demonstrated using amplitude modulation (AM) and frequency modulation (FM) readout of the magnetic signal. In AM operation, the noise at the sensor´s output is equivalent to 128 nT/rt-Hz and the bandwidth is 4 Hz. In FM operation, the noise at the sensor´s output is equivalent to 500 nT/rt-Hz and the bandwidth is 50 Hz.

Keywords

amplitude modulation; elemental semiconductors; force measurement; force sensors; frequency modulation; magnetic sensors; micromechanical resonators; microsensors; silicon; AM readout; FM readout; Lorentz force detection; Si; amplitude modulation readout; bandwidth 4 Hz; bandwidth 50 Hz; frequency 105.5 kHz; frequency modulation readout; magnetic sensor technology; magnetic signal; micromechanical oscillator; quality factor; Frequency modulation; Lorentz covariance; Magnetic field measurement; Micromechanical devices; Oscillators; Resonant frequency; Silicon; Lorentz force; MEMS; magnetic sensors; oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2014 IEEE International

Conference_Location

Taipei

Type

conf

DOI

10.1109/FCS.2014.6859914

Filename

6859914