Title :
Atomically-thin MoS2 resonators for pressure sensing
Author :
Jaesung Lee ; Feng, Philip X.-L
Author_Institution :
Case Sch. of Eng., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
We describe the first experimental investigation of pressure-dependent resonant motions in high-frequency circular drumhead resonators based on atomically-thin molybdenum disulfide (MoS2), which demonstrate attractive performance and potential for pressure sensing. Circular bilayer and trilayer MoS2 membrane resonators with diameter of ~1.8μm are studied in the pressure range of ~10mTorr to ~400Torr. We observe frequency shifts due to membrane bulging, tensioning, and squeeze-film effects with varying pressure. We find very high pressure responsivity of resonance frequency of ~0.77MHz/Torr, ~0.043MHz/Torr, and ~0.21MHz/Torr, in different pressure regimes. These results show that MoS2 membrane resonators are exceptional for pressure sensing in a wide pressure range.
Keywords :
membranes; micromechanical resonators; molybdenum compounds; nanosensors; pressure sensors; thin film sensors; MoS2; circular bilayer membrane resonator; circular drumhead resonator; frequency shift; membrane bulging; membrane tensioning; pressure dependent resonant motion; pressure sensor; squeeze film effects; trilayer membrane resonator; Frequency measurement; Measurement by laser beam; Micromechanical devices; Optical resonators; Pressure measurement; Resonant frequency; Sensors; air damping; membrane; molybdenum disulfide (MoS2); pressure sensor; resonator; two-dimensional (2D) crystals;
Conference_Titel :
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location :
Taipei
DOI :
10.1109/FCS.2014.6859918
