• DocumentCode
    1859553
  • Title

    Catalyst-free GaN nanorods grown by metalorganic molecular beam epitaxy

  • Author

    Kuo, S.Y. ; Kei, C.C. ; Chao, C.K. ; Hsiao, C.N. ; Lai, F.I. ; Kuo, H.C. ; Hsieh, W.F. ; Wang, S.C.

  • Author_Institution
    Precision Instrum. Dev. Center, Nat. Appl. Res. Lab., Hsinchu, Taiwan
  • fYear
    2005
  • fDate
    11-15 July 2005
  • Firstpage
    613
  • Abstract
    Without a catalyst or template layer, GaN nanorods were successfully grown on c-sapphire substrates by RF-radical source metalorganic molecular beam epitaxy (RF-MOMBE). XRD, SEM, TEM, EDX and micro-PL were employed to characterize the structural and optical properties of GaN nanorods. The growth of GaN nanorods was uniformly observed across the substrate surface. These nanorods have an average diameter of 50 nm. and the rod number density can reach 1×1010 cm-2 depending on the growth parameters. The clear lattice fringes in HRTEM image revealed the growth of high quality hexagonal single-crystal GaN nanorods and no droplet was observed at the end of the nanorods. Meanwhile, EDX analysis revealed that gallium and nitrogen as the only detectable elements. Room-temperature photoluminescence of GaN nonorods showed a band-edge-emission at the energy position of ∼3.4 eV. The catalyst-free growth mechanism of GaN nanorods was discussed on the basis of experimental results in this work. These high-quality and high-density GaN nanorods might be useful for practical applications in nanoscale optoelectronic and electronic devices.
  • Keywords
    III-V semiconductors; X-ray chemical analysis; X-ray diffraction; band structure; chemical beam epitaxial growth; gallium compounds; molecular beam epitaxial growth; nanostructured materials; nanotechnology; photoluminescence; scanning electron microscopy; semiconductor growth; transmission electron microscopy; wide band gap semiconductors; 293 to 298 K; 50 nm; Al2O3; EDX; GaN; HRTEM; RF-MOMBE; RF-radical source metalorganic molecular beam epitaxy; SEM; TEM; XRD; band-edge-emission; c-sapphire substrates; catalyst-free GaN nanorods; hexagonal single-crystal; lattice fringe; metalorganic molecular beam epitaxy; microPL; nanoscale electronic devices; nanoscale optoelectronic devices; number density; optical properties; room-temperature photoluminescence; structural properties; substrate surface; template layer; Gallium nitride; Molecular beam epitaxial growth; Molecular beams; Nanoscale devices; Nanotechnology; Nitrogen; Optical microscopy; Scanning electron microscopy; Substrates; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2005. 5th IEEE Conference on
  • Print_ISBN
    0-7803-9199-3
  • Type

    conf

  • DOI
    10.1109/NANO.2005.1500831
  • Filename
    1500831