Title :
Novel extension methods of the sensing pressure range of the Pirani vacuum sensor
Author :
Takashima, N. ; Kimura, M.
Author_Institution :
Fac. of Eng., Tohoku Gakuin Univ., Tagajo, Japan
Abstract :
We have extended measurable pressure range of the thin film Pirani vacuum sensor that is still sensitive above 1 atm. In our thin film Pirani vacuum sensor, our proposed temperature difference sensor of the short circuit Seebeck-current detection type thermocouple is used in order to get extremely high sensitivity, especially in high vacuum range. We have achieved much wider measurable pressure range over 8 digits by use of our new simple thin film Pirani vacuum sensor than that of the traditional one. We could expand the pressure sensitivity beyond 1 atm. by adoption of the vibration of the sensing cantilever due to the sudden heating.
Keywords :
pressure measurement; pressure sensors; temperature sensors; thermocouples; thin film sensors; pressure range sensor; pressure sensitivity; short circuit Seebeck-current detection type thermocouple; temperature difference sensor; thin film Pirani vacuum sensor; Diodes; Gas detectors; Pressure measurement; Temperature distribution; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors; Thin film circuits; Thin film sensors; Pirani; SOI; Vacuum sensor; cantilever; heater; temperature sensor; thermocouple; vibration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285737
